Model-Driven MEMS Design Automation: Bridging Concept to Production with Reduced Order Modeling

iROM Modelbuilder is an advanced MEMS design software that incorporates cutting-edge reduced order modeling (ROM) techniques to simulate nonlinear electrostatic and mechanical behaviors in microelectromechanical systems (MEMS). Unlike conventional finite element methods, iROM’s ROM technology enables rapid yet accurate simulations of full-scale MEMS devices, such as quad-mass gyroscopes. This is essential for applications like autonomous driving, where both speed and precision in the development are becoming more and more critical. The software integrates detailed manufacturing parameters, such as edge-side-wall-slopes and corner-rounding, which allows for more accurate and robust simulation already in the early design stage.

Additionally, iROM Modelbuilder supports a seamless, automated design workflow that spans from initial layout sketching to 3D geometry generation, ROM model computation, and system-level simulation. With interfaces to MATLAB Simulink and VHDL, the software empowers engineers to explore design variations and optimize sensor performance efficiently. This automation-driven approach shortens development cycles without sacrificing model fidelity, allowing users to conduct high-precision simulations on standard desktop hardware. By redefining efficiency and accuracy in MEMS design, iROM Modelbuilder sets a new benchmark for innovation for MEMS development.